摘要
研究了应用移相干涉术测量新的一等量块的方法。对于干涉图像进行多幅图的采样 ,由移相法计算量块测量面和与其研合的辅助平晶表面的波面面形 ,着重研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术 ,得到一幅表征它们表面的离散波差值 ,并给出量块工作面长度和长度变动量的测量结果。
The method of measuring new first-grade gauge block by phase-shift interferometry has been studied. Firstly, multi-frame interference patterns are captured by CCD, then the shape of the measured surface of the gauge and the assistant reference flat to be wrung are obtained by phase-shift arithmetic. In particular, the unwrapping wavefront principle and technology are studied when there are step and discontinuity in the gauge interference patterns. The discrete wave error is calculated, which is fitted to be a continuous and smooth surface. The measurement results of guage block length and dynamic argument are given.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2002年第2期249-252,共4页
Acta Optica Sinica
