CVD金刚石薄膜热导率的研究

STUDY ON THERMAL CONDUCTIVITY OF CVD DIAMOND FILM

研究了直流等离子体喷射沉积金刚石膜的晶粒尺寸、晶粒取向、膜厚、杂质和缺陷对金刚石膜的热导率的影响。结果表明 ,随着晶粒尺寸的增大 ,金刚石膜的热导率先慢后快逐渐增大 ;随着膜的增厚 ,热导率先大幅度提高 ,达到一定值后 ,变化率变小 ;晶粒 (111)取向对金刚石膜的热导率最有利 ,其次是 (110 ) ;非金刚石碳相和缺陷都降低膜的热导率 。

The influence of grain size, grain orientation, film thickness, impurities and imperfection of CVD diamond on thermal conductivity of CVD diamond film prepared by Direct Current Plasma Jet Deposition Method was studied. The results showed that the thermal conductivity increassed gradually with increasing of grain size. When diamond films became thicker, thermal conductivity gone up sharply at first, but it became stable after the grain size reaching a certain value; the grains of (111) orientation were most favorable for the thermal conductivity and then the (110) orientation. The non diamond carbon phases and lattice imperfections lowered the thermal conductivity, but cracks and gaps within diamond grains influenced thermal conductivity more strongly than non diamond carbon phases.