摘要
利用负衬底偏压和发射电子增强核化的方法 ,通过微波等离子体和热灯丝 CVD法在 Si (10 0 )上合成出了高度定向的异质外延金刚石膜。并利用冷离子注入和快速退火处理技术完成 P型掺杂异质外延金刚石膜的制作 ,研制出高灵敏度的压阻和磁阻传感器件。试验结果表明 ,这些器件不仅具有高灵敏度 ,而且在高温。
Heteroepitaxial diamond films were grown on Si(100) via electron emission with a bias voltage, by using microwave plasma CVD and hot filament CVD. The piezoresistivity and magnetoresistivity of p type diamond films obtained by the cold implantation and rapid annealing have been investigated.The experimental results show that epitaxial diamond films have pronounced piezoresistivity and magnetoresistivity effect and can still be operated under extreme conditions such as high temperature, heavy radiation and a strong chemical corrosive environment
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2001年第6期440-443,共4页
Rare Metal Materials and Engineering
基金
国家自然科学基金资助项目 (5 0 0 0 5 0 2 7)
