摘要
本文通过大量的文献资料,评述汽车MEMS(微机电系统)传感器的应用现状及发展趋势,其中重点介绍几种传感器的原理和结构,同时对该领域的产业化也进行了探讨。
Large numbers of information about the application and development of automotive MEMS (micro-electromechanical -systems) sensors are reviewed in this paper. Especially the principles and structures of some of them are introduced. The industrialization trend in this area is also discussed.
出处
《传感器世界》
2002年第3期7-10,共4页
Sensor World
