摘要
介绍了溶胶 -凝胶薄膜制备法 ,研究了浸涂法和旋涂法对薄膜质量的影响因素和控制理论 ,阐述薄膜干燥法与裂纹形成机理 ,基片因素对晶体结构的影响等问题。讨论溶胶 -凝胶法制膜过程中 。
The preparation technologies of thin films by Sol Gel methods were described in this paper.The influences of the dipping and spin coating processing paraneters on the properties of the thin films were discussed theoretically.The formation and development of cracks during dying,the effect of substrate properties on the microstructure of the thin films,and the formation of highly oriented perovskite type ferroelectric thin films were also studied in this paper in detail.
出处
《压电与声光》
CAS
CSCD
北大核心
2002年第1期57-60,共4页
Piezoelectrics & Acoustooptics
基金
广东省自然科学基金资助项目 (990 616)
