摘要
非接触式压力传感器利用特殊的机械结构,大大改善了传统接触式压力传感器工作区域狭小,线性度较差等问题,使压力传感器在高载荷条件下,由小扰度向大扰度过渡时,不产生非线性跳变,从而大大提高了器件的稳定性与动态特性。
The sensor,discussed in the paper,is provided with a special mechanical structure.By this way,it comes over many shortcomings of the traditional pressure micro sensor,whose work range is narrow.Furthermore,it avoids the discontinuity of the traditional pressure micro sensor,when the dis tortion increases,under the great pressure.The dynamic characters and stability are improved markedly.
出处
《微纳电子技术》
CAS
2002年第2期34-37,共4页
Micronanoelectronic Technology
