摘要
介绍了采用压力 -真空平衡气足作支承、PTFE材料作导轨的工件台的组成 ,并对气足的设计计算进行了讨论。最后给出了所研究的工件台的检测结果。
It is introduced in the text that constitutes of the positioning stage which is supported on the pressure-vacuum balance air-foot.The oriented orbit of the positioning stage is make up of material of PTFE.And we discuss the design and calculation of air-foot.In the last,the testing results of the positioning stage is presented.
出处
《电子工业专用设备》
2001年第2期14-16,共3页
Equipment for Electronic Products Manufacturing
