摘要
剖析了各种压阻式力敏硅传感器的结 构，介绍了其工作原理和测试方法并， 对力敏硅传感器结构的优劣作出分析， 为合理地选择、应用力敏硅传感器提 供了依据。
In this paper, the structures of various piezoresistive sensors were presented. The working theory and test methods were introduced. And the advantages and shortcomings of different silicon piezoresistive sensor structures were analyzed to provide a reference for rational selection and application of silicon piezoresistive sensors.
出处
《电子质量》
2001年第7期23-28,共6页
Electronics Quality
关键词
力敏硅传感器
压阻效应
惠斯登电桥
结构
silicon piezoresistive sensor, piezoresistance effect, Wheatstone bridge.
