摘要
本文介绍了一种平面旁热式甲烷气敏元件的研制。它是利用高频溅射仪在硅片上制作出加热电阻。在它的气敏材料中,通过添加多种物质来降阻,从而使元件工作温度易于达到甲烷气体的敏感温度区域。并讨论了不同加热电压对灵敏度的影响。
A kind of planar heater type CH4 gas sensor is presented in this paper. Its heating resistor is fabricated by RF sputtering technique. In its sensing material, several additives are added in to reduce the resistor of sensing film. So it can easily reach the sensitive temperature region of CH4 gas. And the sensitivity is also discussed under different heating voltage in this paper.
出处
《传感器世界》
2001年第10期16-18,共3页
Sensor World
