投影光刻机镜头的装校关键工艺与技术

The Key Craftwork and Technique of Assembling and Adjusting of Projective Lens of Stepper

重点介绍投影光刻镜头的装配结构、材料和加工、定心、检测、调整、连接等关键工艺环节的基本要求、工艺方法和保证措施。在此基础上介绍了一种光刻镜头专用装校系统 ;最后结合我国的光刻镜头研制现状和存在问题对今后的发展方向提出几点个人见解。

In this paper, author mainly introduced the basic requirement,craftwork method and guarantee measurement in assemble structure,material,procession, centering, inspection, adjustment and junction of projective lens of stepper.And with this understanding, focused on a special system for the lens'assembling and adjustment.Third, tabled some individual proposals about the development of the lens in the future, linking with its developing status in quo and existent problems.