射频激励铜离子激光器阻抗特性实验研究

Experimental Study on Impedance Characteristics of the Cu Ion Laser at RF Discharge Excitation

利用自行研制的传感器和测量装置 ,通过对射频放电电压电流以及其相位角的测定 ,结合放电管的等效电路 ,对射频激励激光器阻抗特性进行研究 ,得出射频激励激光器等离子体的伏安特性曲线 ,以及等离子体电阻、容抗与气体压强、放电电流之间的实验曲线。

The impedance characteristics of RF discharge CW laser are studied by measuring the current, voltage and phase angle. The V-I characteristic, impedance and capacitance of the RF discharge plasma changing with the gas pressure and current are given.