电子隧道效应在微机械振动陀螺中的应用

Application of Electron Tunneling Effect on Micromachined Gyroscope

简介微机械振动陀螺的工作原理和电子隧道效应原理 ,电子隧道效应在敏感微小位移的变化有极高的灵敏度 ,已成功地应用在加速度计、红外探测器、磁强针等微传感器上 .本文提出把电子隧道效应应用到微机械振动陀螺的输出检测 ,并分析了输出为角振动和线振动的结构设计方案及检测方式 .

This paper describes the principle of micromachined gyroscope and electron tunneling effect,Electron tunneling effect has very high sensitivity in detecting micro position and was succeed in putting on sensors,including accelero meters,infrared detectors,magnetometers.The application of electron tunneling effect on output detection of micromachined gyroscope is expounded,and the structural scheme and detection mode is analysed.