摘要
利用微机械加工技术、各向异性腐蚀技术研制了具有三维结构的微腔型传感器 ,微芯片 3× 6mm2 具有三维腔体 腔深 3 0 0μm,铂工作电极 1 .2 1 .2 mm2 ,Ag/ Ag Cl参比 ,工作电极与 Ag/ Ag Cl参比集成在同一微芯片上 .作者对微腔型电极进行了电化学特性的表征 ,并测试了微芯片上 Ag/ Ag Cl参比电极的性能 ,考察了微腔型传感器在化学传感器、生物传感器方面的初步应用 ,对 H2 O2 。
A microchip with three dimensional silicon chamber (1.2×1.2mm 2 and 300μm thick) was developed for the construction of micro size sensor by micromachining technology and anisotropic etching. The electrochemical characterization of its Pt working electrode was investigated and the performance of its Ag/AgCl reference elecrode was evaluated. The preliminary application in the detection of H 2O 2 and galactose was also reported.
出处
《上海师范大学学报（自然科学版）》
2002年第1期47-50,共4页
Journal of Shanghai Normal University(Natural Sciences)
基金
上海市教委发展基金资助项目 CL970 9
