掠出射X射线荧光分析

GRAZING-EXIT X-RAY FLUORESCENCE ANALYSIS

掠出射X射线荧光分析技术是全反射X射线荧光分析技术的延伸和发展 ,文章介绍了掠出射X射线荧光分析技术的形式、特点、基本原理和作者在实验室搭建的实验装置 ,简述了掠出射X射线荧光分析技术的发展史 ,以及该技术在化学元素微量和痕量分析及薄膜特性分析等领域中的应用 ,展望了这种技术今后的发展前景 .

Grazing-exit X-ray fluorescence analysis (GEXRF) is the extension and development of total reflection X-ray fluorescence analysis technology. Its method, characteristics, basic principles and the experimental apparatus that we set up in the lab are presented. Its history and applications in the field of trace and ultra-trace determination and thin layer analysis are briefly described, with special mention of the analysis of light elements by GEXRF with a wavelength-dispersion detector.