激光法红外热像镜组中心偏测量与调校研究

Research on the measurement and adjustment of infrared optical lens decentration using laser method

论述了多镜片成像光学镜组中心偏的理论表征 ,以及自准反射旋转法测量中心偏的原理。设计了用于红外光学镜组的中心偏检测系统。系统包括用于 8～ 14 μm红外光学系统中心偏测量的CO2 激光 ;可调焦望远镜 ;采用TGS热释电热像仪与计算机配合的数据读出及处理系统 ;径向跳动≤ 1μm ,轴向晃动≤ 1″的高精密基准轴工作台。系统测量中心偏精度为 :角度≤ 2″ ,线度≤ 0 .0 2mm。给出了中心偏数据处理程序。系统也可用于在线装校 ,更换光源 (用He Ne激光代替CO2 激光 )系统可用于 3～ 5 μm红外光学系统的测量。进一步改进并利用激光的相干特性 ,系统可实现中心偏测量精度≤ 1μm。

The theory characterization of imaging optical lens decentration and the principle of autocollimiting rotary reflection method are analyzed. Decentration measurement system of infrared optical lens is designed in principle, including CO 2 laser using in the decentration measurement of 8～14μm infrared optical system; internal focusing telescope; TGS pyroelectric thermal image instrument and computer data processing system; high precision datum axle worktable which radial missing less than 1μm, axial shaking less than 1″. The precision of decentration measurement in this system is angle ≤2″, linear extent ≤0.02mm. The data processing program is also put forward. This system can be also used in on line measurement and adjustment. It can be used in the measurement of 3～5μm optical system while changing the light source into He Ne laser. The precision of decentration measurement will less than 1μm when the interference performance of laser coherence is used.