钛等离子渗氧研究

Study on Plasma Oxygen Permeation of Titanium

为了提高钛表面硬度和耐磨性，采用辉光放电等离子渗氧技术对钛进行表面处理．结果表明，渗氧层厚度与氧分压、温度和时间呈明显的对应关系．特别是，在空心阴极辉光放电条件下，离子轰击会加强氧的离子化，促进渗氧，有助于低价态氧化物的形成．在表层所形成的ＴｉＯ其硬度达到或接近ＴｉＮ的硬度水平．

Titanium surface treatment has been carried out by using glow plasma oxygenizing for impro- ving the hardness and wear resistance. The results indicate that there exist a certain realationship beetween the thickness of the oxidation layer and the oxygen partial pressure,temprature and time. Especially in the condi- tion of hollow cathode dischage, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of Ti. The hardness of TiO formed on the titanium substrate approachs that of TiN.