摘要
本文介绍了金属诱导晶化非晶态硅制备多晶硅薄膜的新方法 ,综述了制备金属 /非晶态硅复合薄膜的各种方法与晶化结果 。
A novel technology for preparation of poly silicon films metal induced crystallization(MIC) of amorphous silicon films is introduced. the preparation technique of metal/amorphous silicon compound films and the result of crystallization temperature are reviewed. this paper is centered mainly on introducing the mechanism of the MIC and the suitability of applications for devices.
出处
《材料科学与工程》
CSCD
北大核心
2002年第1期81-83,63,共4页
Materials Science and Engineering
基金
国家自然科学基金资助项目 (697760 0 4与 69890 2 30 )
教育部重点基础研究基金的资助项目
