宽温区高均匀度热沉调温系统设计与实现

Design and implementation of temperature regulation system for wide temperature zone and high uniformity heat sink

首先分析了热沉调温系统的主要影响因素,包括:热沉结构、热沉的分区,热负荷的大小及其分布和气氮质量流量等。在采用胀板式热沉结构前提下,重点研究气氮质量流量对热沉热性能指标的影响。通过相关计算和软件仿真,表明热沉进出口温差随气氮质量流量的增大而降低,热沉壁面的温度均匀度提高。并通过系统调试实现了热沉在-120℃—120℃范围内连续可调,热沉温度均匀性<6℃,控温精度在±0. 3℃以内的良好效果。

The main influencing factors of the heat sink temperature regulation system were analyzed,including heat sink structure,heat sink partition ,heat load size and distribution and gas nitrogen mass flow.Under the premise of using the expansion plate type heat sink structure,the influence of the mass flow of gas nitrogen on the thermal performance index of heat sink was mainly studied.Calculation and simulation results show that the temperature difference between the inlet and outlet of the heat sink decreases with the increase of the mass flow of the gas nitrogen,and the temperature uniformity of the wall surface of the heat sink increases.Through the system de- bugging,the heat sink is continuously adjustable in the range of -120 ℃-120 ℃ ,the temperature uniformity of the heat sink is less than 6 ℃ ,and the temperature control accuracy is within ± 0.3 ℃.