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Electrical contacts to two-dimensional transition-metal dichalcogenides 被引量:1

Electrical contacts to two-dimensional transition-metal dichalcogenides
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摘要 Two-dimensional(2D) transition-metal dichalcogenides(TMDCs) have attracted enormous interests as the novel channel materials for atomically thin transistors. Despite considerable progress in recent years, the transistor performance is largely limited by the excessive contact resistance at the source/drain interface. In this review, a summary of recent progress on improving electrical contact to TMDC transistors is presented. Several important strategies including topology of contacts, choice of metals and interface engineering are discussed. Two-dimensional(2D) transition-metal dichalcogenides(TMDCs) have attracted enormous interests as the novel channel materials for atomically thin transistors. Despite considerable progress in recent years, the transistor performance is largely limited by the excessive contact resistance at the source/drain interface. In this review, a summary of recent progress on improving electrical contact to TMDC transistors is presented. Several important strategies including topology of contacts, choice of metals and interface engineering are discussed.
出处 《Journal of Semiconductors》 EI CAS CSCD 2018年第12期60-67,共8页 半导体学报(英文版)
关键词 two-dimension channel materials Fin-FET two-dimension channel materials Fin-FET
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