InP高压直拉单晶炉的热场优化设计与分析

Design and analysis of the thermal field of InP high pressure single crystal furnace

高压直拉单晶炉的热场对磷化铟(InP)晶体生长过程有重要影响,存在缺陷的热场很难生长出合格的InP单晶,因此对InP晶体生长的热场进行优化设计与分析非常必要。提出了采用新型的碳/碳(C/C)复合材料加热器、复合固化硬毡为保温筒的热场结构,并通过仿真设计优化了InP单晶热场,解决了原有的以石墨加热器和碳纤维软毡为基础的InP单晶热场稳定性和对称性差以及使用寿命短的问题。经过实验测试,加热效率提高了25%,使用寿命达到90炉以上。

The thermal field of high-pressure single crystal furnace has great influence on the growth process of indium phosphide(InP) crystal. It is difficult to grow high quality single crystal in defective thermal field, so it is necessary to optimally design and analyze the thermal field for InP crystal growth. In this paper, the new type of carbon/carbon(C/C) composite heater and composite curing hard felt are used as the thermal field structure of the insulation tube. The thermal field for InP crystal growth is designed and optimized through numerical simulation, which solves the problem that the stability and symmetry of the thermal field for InP single crystal growth based on graphite heater and carbon fiber soft felt are poor and the service life is short. Through actual experiment test, the heating efficiency is improved by 25% and the service life is extended to above 90 times.