溶胶-凝胶法氧化锌薄膜导热性能实验研究

EXPERIMENTAL STUDY ON THERMAL CONDUCTIVITY OF ZINC OXIDE THIN FILM BY SOL-GEL TECHNIQUE

采用溶胶-凝胶法制备氧化锌前驱体溶液,用浸渍提拉法在玻璃纤维上制备厚度分别为39和17nm的氧化锌薄膜,利用瞬态电热技术测量得到100和200℃退火温度下氧化锌薄膜沿面内方向的导热系数,并对影响结果的因素进行分析。实验结果表明,前驱体溶液浓度增加,氧化锌薄膜导热系数变大,且100℃退火下氧化锌薄膜的导热系数大于200℃退火下导热系数。

The Sol-Gel method is used to get the precursor solution of zinc oxide (ZnO),and the dip coating method is used to prepare 39 nm and 17 nm thick ZnO films on glass fiber.The thermal conductivity of ZnO film along the in-plane direction at 100 and 200℃ annealing temperatures is measured by the transient electro-thermal technique.The experiment results showed that the thermal conductivity of ZnO film increases when the concentration of the precursor solution increases,and the thermal conductivity of the zinc oxide film annealing at 100℃ is greater than the thermal conductivity of the film annealing at 200℃.