摘要
介绍了一种拉杆式线位移传感器校准系统,该系统以激光干涉仪作为长度标准器,配合万工显等设备完成校准工作。经实验验证,该系统满足该类传感器的校准需求。
This paper introduced a calibration system of pull -rod type line displacement sensor,which used laser interferometer as length standard to complete the calibration work with other equipment such as universal tool microscope.The system met the calibration requirement of the sensor by experiments.
作者
李季
张涛
权伊明
Li Ji;Zhang Tao;Quan Yiming
出处
《计量与测试技术》
2018年第12期23-24,共2页
Metrology & Measurement Technique
关键词
拉杆式线位移传感器
校准系统
激光干涉仪
不确定度评定
pull -rod type line displacement sensor
calibration system
laser interferometer
uncertainty of measurement
