锆管表面沉积Cr-TiAlSiN复合涂层的表面形貌与性能研究（英文）

Micro-morphology and Performance of Cr-TiAlSiN Composite Coatings Deposited on Zirconium Tube

分别采用多弧离子镀和中频非平衡磁控溅射工艺,在锆合金管材基体上制备Cr-TiAlSiN复合涂层。利用扫描电镜对复合涂层的表面及截面微观形貌进行观察;利用Image J软件对复合涂层进行孔隙率和表面大颗粒数目统计分析;利用弹簧拉压试验机对涂层的膜基结合强度进行测量;利用高温热处理炉对试样进行800℃高温抗氧化试验和1200℃高温淬火实验。结果表明:采用多弧离子镀工艺所获得的涂层表面大颗粒物质比较多,但是孔隙率比较低,致使其高温抗氧化性能较好。复合涂层膜基界面比较明显且比较均匀,膜基结合强度较高,大于22.68MPa,1200℃高温淬火实验侧面表明采用多弧离子镀工艺的涂层其膜基结合强度较好。

Cr-TiAlSiN composite coatings were deposited on the substrate of zirconium alloy tubes by multi-arc ion plating and intermediate frequency unbalanced magnetron sputtering,separately.The micro-morphology of surface and cross-section of the composite coatings was observed by a scanning electron microscopy;the porosity and the quantity of large particles on the surface were analyzed by Image J software;the adhesion strength between the coatings and substrate was measured by a pull pressed spring testing machine;the samples were subjected to high temperature oxidation test at 800℃ and high temperature quenching test at 1200℃ using a high temperature furnace.The results show that there are more large particles on the surface of the coating deposited by multi-arc ion plating,but the porosity of that is relatively low,so that its high temperature oxidation resistance behavior is better.The interface of the composite coatings is relatively clear and uniform,and the adhesion strength between the coatings and substrate is relatively strong,both of which are higher than 22.68 MPa.According to the high temperature quenching test at 1200 ℃,it also turns out that the adhesion strength is better with the process of multi-arc ion plating.