基于硅纳米线检测的微加速度计设计与噪声分析

Micro-Accelerometer Design and Noise Analysis Based on Silicon Nanowires

利用硅纳米线压阻系数比压敏电阻压阻系数高的特性,设计了一种基于硅纳米线的加速度计.首先对硅纳米线微加速度计结构参数进行了设计,利用ANSYS软件对微加速度计结构进行静态分析;其次利用COMSOL对硅纳米线压阻系数进行了仿真计算;最后对其总灵敏度进行计算,并对微加速度计的噪声进行了分析计算.仿真结果表明,该款硅纳米线微加速度计的理论灵敏度达到35.09 mV/g,带宽为5 784Hz,噪声为4.7μg/(Hz)(1/2).

Using apiezoresistance coefficient of silicon nanowires to have a higher piezoresistive coefficient than a varistor,an accelerometer based on silicon nanowire is designed.Firstly,silicon nanowires micro accelerometer structure parameters were designed for micro accelerometer structure static analysis by using ANSYS software;secondly,using COMSOL on silicon nanowires piezoresistive coefficient was calculated;finally,the total sensitivity was calculated,and the micro acceleration noise meter was analyzed and calculated.Simulation results show that the theoretical sensitivity of silicon nanowire micro accelerometer can reach 35.09mV/g,the bandwidth is 5 784 Hz,and the noise is 4.7μg/(Hz)(1/2).