沉积气压对多弧离子镀MoN涂层结构和性能的影响

Effects of Deposition Pressure on Structure and Properties of MoN Coatings by Multi-arc Ion Plating

为了研究沉积气压对多弧离子镀MoN涂层结构和性能的影响,优化涂层的制备工艺参数,现采用多弧离子镀技术通过改变沉积过程中N2的气压在硬质合金表面获得不同的Mo N涂层。分别采用GIXRD、SEM、维氏显微硬度计、UMT摩擦磨损实验机和划痕仪等对MoN涂层的物相结构、微观形貌、显微硬度、摩擦系数与膜基结合力等进行分析。结果表明:随着沉积气压的增大,涂层的相结构从γ-Mo_2N逐渐转化为δ-MoN,其中δ相(200)晶面衍射峰逐渐增强;膜层表面质量逐渐变好,膜基结合强度、平均摩擦系数均先增大后减小,相对于基体表现出了较好的摩擦性能。

In order to study the effects of deposition pressure on the structure and properties of multi-arc ion plating MoN coatings and optimize the preparation process parameters of the coating, the multi-arc ion plating technology wss used to obtain different Mo N coatings on the surface of cemented carbide substrates by changing the pressure of N2 in the deposition process. GIXRD, SEM, Vickers microhardness tester, UMT friction and wear tester, scratch tester, etc were used to characterize the phase structure, micro-morphology, microhardness, friction coefficient and film-substrate adhesion strength of the Mo N coatings, respectively. The results show that the phase structure of the coating gradually transforms from γ-Mo2 N toδ-MoN as the deposition pressure increases. The diffraction peak of the δ phase(200) crystal surface gradually increases, and the surface quality of the coating gradually becomes better, both of the adhesion strength and the average friction coefficient increase first and then decrease, showing better friction properties compare with the substrate.