摘要
针对微机电系统设计中存在的微摩擦问题,论述了开展微观摩擦研究的意义和必要性。全面总结了微摩擦基本特性研究的进展,包括微观摩擦与宏观摩擦的对比,微观摩擦与表面形貌的相关性,以及粘滑现象等。提出了控制微摩擦特性的一些主要研究方向。
:Based on the existing problems of micro-friction in MEMS design, the significance and needs of study on micro-friction are discussed. The progress of research on elemental performances of micro-friction is summarized, including micro-friction in comparison with micro-friction, relation between micro-friction with surface topography and mechanism of stick-slip. The main research directions for controlling micro-friction properties are proposed as well.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2002年第3期1-5,共5页
Journal of Mechanical Engineering
基金
国家自然科学基金重点资助项目(59735110)。
关键词
微机电系统
微摩擦
控制
表面形貌
粘液
:Micro electro-mechanical system Micro-friction Performance and control