高支化碱溶性聚酯的合成及光成像研究

Synthesis and photoresist behaviors of highly branched arcylated polyesters

通过１，２，４苯三甲酸酐和环氧氯丙烷合成高支化碱溶性聚酯，再用丙烯酸与多官能团环氧树脂反应产物对高支化聚酯改性得到高支化碱溶性感光聚合物；研究了这类聚合物的碱溶性、感光性和光成像特性。探索了光致抗蚀剂的配方组成和成像因素。结果表明，以接枝引入１５％改性多官能团环氧树脂配制的光致抗蚀剂综合性能最好，分辨率３μｍ以内（白光）。

Highly branched polyesters were synthesized from the reaction of trimellitic anhydride and epichlorohydrin at 110～150℃ for 3～4h catalyzed by tetraethylamine bromide. These polymers were further modified by acrylated epoxy resins, which were prepared by reaction of acrylic acid and multi functional epoxy resins at 90～95℃, into acrylated photopolymerizable polyesters. The aqueous solubility, photopolymerization and photoresist behaviors of these resins were studied. It was found that the acrylated branching polyesters modified with tri- and tetrafunctional epoxy resins exhibited excellent film forming and aqueous solubility, photopolymerization and image forming behaviors were turntable by the adjusting the composition of the polyesters. The polyesters modified with 15% of acrylated epoxy resins showed well behaviors as a resin for photoresists, as the resolution reaching to a few 3μm.