摘要
研究了 Al Ga As窗层中 Al组份的 X射线衍射分析原理和计算方法 。
It described the analysing principle of Al content on AlGaAs buffer layer and gave the calculation formulae corresponding to their strain situations.Besides,some calculation examples were given.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2002年第4期454-457,共4页
Acta Photonica Sinica