透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线研究

THE X-RAY DIFFRACTION ROCKING CURVE OF AlGaAs/GaAs EPITAXIAL LAYER OF TRANSPARENT GaAs PHOTOCATHODE

利用透射式 Ga As光电阴极 Al Ga As/ Ga As外延层的结构特点及其 X射线衍射摇摆曲线分析方法 ,解释了 Al Ga As/ Ga

This paper described the structure characteristics and analysis method of rocking curve of AlGaAs/GaAs epitaxial layer,explained the phenomenon of broading of FWHM and increasing of diffraction peak seperation of rocking curve of AlGaAs and GaAs epitaxial layer with their upgrading growth temperature.