摘要
采用非平衡磁控溅射及等离子体源离子混合注入方法在奥氏体不锈钢 1Cr18Ni9Ti基体上制备N/TiN/Ti(N ,C) /DLC梯度涂层。采用原子力显微镜等手段观察分析梯度膜的显微组织与相组成 ,同时采用纳米压入技术评定膜层的力学性能。实验结果表明 ,采用此方法制备的金刚石膜组织致密 ,性能良好。
In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PⅢ) was adopted to deposit diamond like carbon based functionally gradient N/TiN/Ti(N,C)/DLC film on the 304 stainless steel substrate. AFM was used to analyze the structure of the gradient film. The mechanical properties were evaluated by nano indentation. The results showed this DLC gradient film had good qualities as a solid lubricating coating.
出处
《理化检验（物理分册）》
CAS
2002年第4期139-141,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
国家自然科学基金资助项目 (5 99710 3 0 )
