摘要
介绍了俄歇电子谱术的某些基本问题。内容包括 :俄歇电子发射 ,表面灵敏性 ,俄歇电子谱的测量 ,定性和定量分析 ,深度剖析等。最后介绍了三种俄歇谱仪的功能扩展 ,功函数测量 。
Some fundamental aspects of Auger electron spectroscopy have been reviewed. The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc. The functional extension of Auger electron spectroscopy are also described briefly.
出处
《理化检验（物理分册）》
CAS
2002年第4期182-184,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
