摘要
对二元光学的产生和发展作了介绍 ,并阐述了二元光学元件之一的微透镜 (microlenses)的设计、制作和测试方法以及它们的主要应用。微透镜的设计是基于已成熟的标量衍射理论 ;而其制作过程包括 :计算机设计波面相位、产生掩膜板、光刻或离子 (束 )蚀刻以及复制产生微透镜 ,其关键技术蚀刻方法有等离子蚀刻技术和反应离子蚀刻RIE(ReactiveIonEtching)技术 ;微透镜的测试主要包括衍射效率(diffractiveefficiency)和点扩散函数 (PSF)的测试 ,有直接法和间接法两种测试方法。微透镜可以微型化与阵列化 ,并且可以同微电子器件一起集成化 。
This dissertation mainly describs the origin and the development of binary optics. At the same time, One of elements of binary optics theory-the microlenses and its design, manufacture, testing method, even its primary application are expatiated. The design of microlenses is set up on the basis of the theory of scalar diffraction. It's producing process includes producing by computer, mask-board engendering, photoengraving and etching of ion beam and reproducing microlenses. The measurement of microlenses includes the diffractive efficiency phase and PSF(point spread function) . The microlenses can be miniaturized, arrayed and integrated with microelectronic devices, so it has a wide prospects.
出处
《红外技术》
CSCD
北大核心
2002年第2期18-21,共4页
Infrared Technology
基金
国家高技术研究发展计划资助项目
国家自然科学基金资助项目
关键词
二元光学
微透镜
衍射效率
点扩散函数
蚀刻
binary optics
microlenses
diffractive efficiency
point spread function
etching
