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薄膜热释电红外探测器吸收和响应性能的模拟研究 被引量:3

The Simulation of Absorptance and Response Characteristics for Pyroelectric Thin Films Infrared Sensors
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摘要 采用吸收、热传导和热释电响应模型 ,对薄膜热释电红外探测器的吸收和响应性能进行了模拟研究。当膜系中各膜层材料的物性参数确定时 ,对于不同波长的红外辐射及在不同的调制频率下 。 For pyroelectric thin films infrared sensors, the simulation of absorptance and response characteristics has been made using optical, thermal and pyroelectric models. When the physical parameters of the multilayer system components are definite, the design of the sensor system structure has remarkble influence on the sensor performances as response to the incident infrared radiation with various wavelengths and at different modulation frequency.
出处 《红外技术》 CSCD 北大核心 2002年第2期25-29,共5页 Infrared Technology
基金 863计划新材料领域资助项目(863-715-002-0100)
关键词 薄膜 热释电 红外探测器 模拟 吸收 响应性能 thin films pyroelectric infrared sensors simulation
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