微机形成的非球面干涉图

Generating Aspheric Surfaces Interferograms by Micro-computer

介绍一种新的非球面检测方法。用微机技术，对偏离球面很小的非球面作模拟非球面的干涉，获得理想的非球面干涉图。用模拟的理想干涉图作“样板”，使高次非球面的面形在激光球面干涉仪上进行精确测量成为可能。提供了四种类型小非球面度的高次或二次非球面干涉图。给出了几个在CQG一1型激光球面干涉仪上作出的测量结果。其测量精度约为0．5λ。

This peper dascribes a new testing method for aspheric surface Using the advanced mi-cro-computer technique,we can get the ideal aspherical interferogram by imitating the real aspheritalinterterence. Taking imitating aspherical intcrferogram as a test-plate,it is possible to test the shapeof a high order aspherital surface with a laser aspheric interferometer. We have now provided fourtypes of aspheric surfaces formulas optimizing for.slight aspherical surfaces. We also give several successful measurement obtained by CQG- 1 laser spherical interferometer. The measurement ac-curacy of this method is about 0. 5.