三维表面粗糙度的均方根波长评定

Characterization of 3-D Surface Topography by Root-Mean-Square Wavelength

基于分形几何理论 ,通过分析随机粗糙表面的轮廓谱矩和表面谱矩的特性 ,提出了具有均一性和随机性的三维表面的均方根波长评定方法 ,并给出了理论推导及计算公式 .还通过仿真模拟和对平面磨削试件的实测 ,验证了该方法的正确性 .结论表明 ,对于不满足均一和随机性的表面 ,一般其加工纹理比较明显 ,可直接在垂直于加工纹理的方向上进行测量和评定 。

Based on fractal geometry theory, a root mean square(RMS) wavelength method was proposed to quantitatively evaluate a 3D stochastic surface topography, by means of the surface spectral moments. Through DFT of the profile measured by a Talysurf 10 contact stylus instrument, we obtained the power spectrum and the fractal dimension of the profile. Further, the zero and 2nd order spectral moments of the profile and the surface were obtained. Using these parameters, the evaluation of RMS wavelength was conducted. By experiments for ground samples, the validity of the present method was confirmed.