锂铁氧体表面沉积Cu-Ti复合金属波导膜系的工艺

Process for plating Cu-Ti co-metal wave-guide films on Li-ferrite surface

采用磁控溅射镀膜方法 ,在锂铁氧体材料表面 ,制备了 Cu- Ti复合金属波导膜系。本文简单介绍了设备的改造特点 ,对整个工艺过程进行了分析研究 ,对制备的 Cu- Ti复合金属波导膜系进行了性能测试 ,结果表明 。

The Cu Ti co metal wave guide films on Li ferrite material surface have been made by magnetron sputtering deposition. In this paper, characteristics of the machine are simply introduced. The process technology has been analyzed. A series of measurements show that the properties of Cu Ti co metal wave guide films are suitable for the microwave elements.