摘要
微动力机电系统和微发动机是动力装置发展的第四个里程碑。本文先阐述了该系统的重要意义 ,进而描述了它的发展概况。指出了该系统面临的挑战和解决的基本途径。微动力机电系统的应用前景是广阔的 。
Power MEMS and micro engine are the forth milestone of the development of power devices. In this paper, the significance of developing this kind of system is delinated. Then the advancement in this field is described. Some challenges faced when developing this system and promising approaches to these challenges are put forward. Power MEMS will have widely future application will have significant influence to society and economy.
出处
《世界科技研究与发展》
CSCD
2002年第1期24-27,共4页
World Sci-Tech R&D