碳化钛太阳能选择性吸收薄膜的研究

STUDY OF TiCx SOLAR ENERGY SELECTIVE ABSORBING FILMS

本文报道了适用于真空集热管的碳化钛(TiC_x)太阳能选择性吸收薄膜的制备及性能。采用磁控溅射单靶金属钛反应溅射法在铜基体上沉积制成选择性吸收薄膜,其光学吸收率α为～0.92,红外热发射率ε为～0.08。

This paper described the preparation and properties of TiCx solar energy selective absorbing films for vacuum collecting tube.The film was deposited onto copper substrate using a single Titanium target reactive d.c.magnetron sputtering.Its optical properties has solar absorptance α~0.92,and thermal emittance ε~0.08.