基于双稳态机制的低g值微加速度开关

Low Value g Micro Acceleration Switch Based on Bistable Mechanism

设计了一种包含双稳态机制的低g值加速度开关,并采用了MEMS中的多层微电铸技术进行加工。该微加速度开关具有体积小,响应阈值精确,响应速度快,具有闭合保持功能等优点。微加速度开关的结构包括双稳态柔性悬臂梁,可移动质量块和固定触点,其中双稳态柔性悬臂梁的宽度、厚度和长度分别是28.0μm、25.0μm和5 150.0μm.由于使用了非线性双稳态机制,因此可以通过更加精确的模型来设计加速度开关的触发阈值。经过多次试验表明:器件的触发的加速度阈值是(32.6±0.2)g,可移动质量块的行程距离是530μm,并且开关在闭合后具有保持功能。

In this paper,we designed a bistable mechanism of low values g acceleration switch,and adopted the multilayer MEMS micro electroforming technology for processing.The micro acceleration switch has the advantages of small volume,precise response threshold,fast response speed and closed holding function.The micro acceleration switch structure including the bistable flexible cantilever beam,movable contact quality and fixed touch spot,among with the bistable of flexible cantilever beam width,thickness and length are respectively 28.0 μm、25.0 μm and 5 150.0 μm.With the use of nonlinear bistable system,models can be more accurate to design the acceleration switch trigger threshold.The experimental results show that after many experiments,the acceleration of a device to trigger threshold is（32.6 ＋0.2）g,movable mass travel distance is 530 μm,and the switch can keep functioning after being closed