超精密纳米时栅传感器试验系统设计

Experimental Design of Ultra-precision Nanometer Time-Grating Sensor System

为了研究性能稳定、纳米级精度、大量程的位移测量传感器,提出了一种基于交变电场耦合的纳米时栅位移传感器。根据纳米时栅试验系统要求,设计一套实验基座机构安装定尺,利用虚拟仪器试验平台,设计纳米时栅试验激励信号,利用精密气浮直线导轨系统的高精度,实现纳米时栅动尺的运动控制。试验表明:纳米时栅传感器在200 mm范围内误差为±300 nm.通过超精密试验系统的设计,为纳米时栅传感器特性的研究提供了保障。

In order to research a displacement measurement sensor which has stable performance,nanometer scale accuracy and large range,the nanometer time-grating sensor based on AC electric field coupling was proposed.According to the nanometer time-grating experiment system requirements,this paper designs a set of test organization to install fixed ruler,using the virtual instrument experiment platform to design the nanometer time-grating excitation signal source and the high precision of the precision floating linear guide system to realize the movement control of nanometer grating moving ruler.Experimental results show that the error of the nanometer grating sensor is ± 300nm when the sensor is within the scope of 200 mm.The design of ultra-precision experimental system provide a guarantee for the research of nanometer time-gating sensor characteristics.