摘要
本文提出了分段等厚干涉法测量平面直线度误差的方法系统误差和方法随机误差的计算式,并指出了这种方法的缺点。
The paper gives formulate of the method systematic error and method random error of the split rang egual thickness interference method measuring plat straightness error, and its drawback.
关键词
分段等厚干涉
测量
直线度
误差
split range egual thickness interference method
standard optic plane glass crystal
two end point connecting line
