摘要
介绍了滚珠丝杠、静压丝杠、直线电机、摩擦驱动等超精密驱动机构 ,比较分析了各机构的优缺点及其在超精密加工领域中的应用前景 .
The application and the development of ultra precision machining are introduced briefly. Driving mechanisms based on ball screw, hydrostatic screw,linear motor, friction driving structure are also introduced in this paper. The advantages and disadvantages of these driving mechanisms and their application prospect are discussed.
出处
《西安工业学院学报》
2002年第1期62-66,共5页
Journal of Xi'an Institute of Technology
关键词
超精密加工
定位精度
分辨率
驱动机构
ultra precision machining
positional precision
distinguish rate
driving mechanism
