溶胶-凝胶法在碳化硅表面浸涂氧化铝薄膜的研究

Study of Al_2O_3 Flim on the Surface of SiC by Sol Gel Method

研究了以异丙醇铝为主要原料 ,异丙醇为熔剂 ,添加乙酰乙酸乙酯作为螯合剂 ,利用溶胶 -凝胶法在碳化硅表面浸涂厚约 0 .5 μm的Al2 O3 多晶膜。用XRD ,IR ,SEM ,TG DTA等测试手段详细研究了涂膜在加热过程中所发生的物理 -化学变化。

This paper represented the preparation process of Al 2O 3 film on the Surface of SiC substrates by the sol gel method,in which Al(C 3H 7O) 3 was used as precusor,C 3H 7OH and EACAC as solvent and chelate agent respectively.XRD,IR,SEM and TG DTA were used to study the chemical physical change of the film at different temperatures.A comparison of the oxidation resistent property of SiC substrates with or without Al 2O 3 film was made.