氧化铝纳米阵列模板的制备和研究

Research on nanometre array template of Aluminium Oxide

分别以硫酸和磷酸为电解液 ,用阳极氧化法在不同工艺下 ,制备纯度为 99.999%,不同晶粒组织的纯铝箔基体上的氧化铝纳米阵列模板 ,得到 5种孔径的纳米孔 :10nm ,2 0nm ,30nm ,6 0nm ,10 0nm ;用透射电镜和X射线衍射进行表征和结构分析 ,观察到了 :阻挡层、趋于六边形的单元结构薄层和不同孔径、密度的纳米孔阵列 ,其结构为无定形 ,对这种自组织结构作了初步的生长过程分析 .

Nanometre array templates with 10-100?nm porousity have been prepared by anodized Aluminium in sulfuric and phosphoric acid solutions.There is no big difference on porous diameter and distribution between 99.999% Aluminium substrates with different crystal metallographical structures.Barrier films,hexagonal cells films and nanometre porous array have been observed by TEM.The evolution process of the self-organizing nanostructure is briefly analyzed.