摘要
提出了一种利用平滑滤波、曲线拟合处理CCD数据的方法。经此方法处理后,测量精度不再受CCD光敏元尺寸的限制,从而大大提高了测量精度。本方法应用于“激光衍射法微孔径测量仪”中,其测量精度≤±0.5μm。
A treatment method with data -smoothing and curve-fitting for CCD data is described in present paper. The accuracy of measurement is not restricted by the size of the CCD photosensitive unit, hence it is incresed magnificently. This method is applied to the measurement of micro hole with laser diffraction. An accuracy of 0.5Hm measurement is reached. It is really satisfied.
出处
《天津轻工业学院学报》
1991年第2期1-6,共6页
Journal of Tianjin University of Light Industry
