期刊文献+

超精密磨削微进给工件平台的研制 被引量:4

Design of a Novel Micro-positioning Work-piece Table for Ultra-precise Grinding
下载PDF
导出
摘要 采用弹性铰链作为预紧机构,采用压电陶瓷作动器作为驱动机构,设计了一种超精密磨削辅助工件平台。具有结构简单、位移分辨率高、动态响应速度快等优点。文中通过试验研究了其在开环和闭环控制下的静态和动态特性,结果表明,其中心部位静态刚度达到200N/μm,Z向的固有频率达到1289Hz。 A micro-positioning work-piece table utilizing flexure hinges and rolling guide as preload and guiding mechanism is developed in this paper. It is characterized by simple structure, high resolution and rapid respond speed. The static and dynamic characters of it have been studied through the experimental method. The data show that the static stiffness of the micro-positioning work-piece table is 200 and the natural frequency in Z-direction is 1 289 Hz.
出处 《天津职业技术师范学院学报》 2002年第1期1-5,共5页 Journal of Tianjin Vocational Technical Teachers'college
基金 天津市自然科学基金项目(013605311)
关键词 超精密磨削 微进给工件平台 研制 压电陶瓷驱动器 静动态特性 弹性铰链 位移分辨率 开环 闭环 平台中心部件 piezoelectric translator micro-positioning work-piece table static and dynamic character
  • 相关文献

参考文献4

  • 1Zhong Z. Nakagawa T. Development of a micro-displacement table for ultra-precision machining and grinding for curved surfaces by the use of it[J]. International Journal of Japan Society of Precision Engineering, 1992, 6(2) : 102 - 107.
  • 2Kim J D.Nam S R. Development of a micro-positioning grinding table using piezoelectric voltage feedback[J].Journal of Engineering Manufacture, 1995, 209: 469-474.
  • 3Gao Y S, Zhang D W, Yu C W. Dynamic modelling of a novel workpiece table for active surface control[J]. Intonationl Journal of Machine Tools and Manufacture. 2001, 41(4): 609-624.
  • 4Park H J. Sung L D. Park T H. Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation[J]. International Journal of Machine Tools and Manufacture, 2001. 41(1): 51-63.

同被引文献18

  • 1任三平,李益民.电致伸缩微位移机构中的预紧力分析[J].机械工艺师,1995(4):11-12. 被引量:2
  • 2朱振华.面向精密加工压电驱动超精密进给工作台设计与研究[D].上海:东华大学,2004.
  • 3Jason G Gullicks, William H Semke. Analytical and experimental analysis of a precision positioning actuator system [ C ]//2004 ASME International Design Engineering Technical Conferences (DETC 2004) and Computers and Information in Engineering Conference, Salt Lake City, 2004: 569 - 576.
  • 4Piezosystem jena.产品说明书[S].2004,4:71-93.
  • 5Andrew Woronko, Jin Huang, Yusuf Altintas. Piezoelectric tool actuator for precision machining on conventional CNC turning centers [ J ]. Precision Engineering, 2003 (27) : 335 - 345.
  • 6Zhong Z, Nakagawa T. Development of a micro-displacement table for ultra-precision machining and grinding for curved surfaces by the use of it[J]. International Journal of Japan Society of Precision Engineering, 1998,6(2) :102 -107.
  • 7金民.超精密进给工作台的设计及控制方法的研究[D].天津:天津大学,2000.
  • 8Zhong Z,Nakagawa T.Development of a micro-displacement table for ultra-precision machining and grinding for curved surfaces by the use of it[J].International Journal of Japan Society of Precision Engineering,1992,6(2):102-107.
  • 9Kim J D,Nam S R.Development of a micro-positioning grinding table using piezoelectric voltage feedback[J].Journal of Engineering Manufacture,1995,209:469-474.
  • 10Gao Y S,Zhang D W,Yu C W.Dynamic modeling of a novel workpiece table for active surface grinding control[J].International Journal of Mechine Tools and manufacture,2001,41(4).

引证文献4

二级引证文献11

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部