摘要
采用弹性铰链作为预紧机构,采用压电陶瓷作动器作为驱动机构,设计了一种超精密磨削辅助工件平台。具有结构简单、位移分辨率高、动态响应速度快等优点。文中通过试验研究了其在开环和闭环控制下的静态和动态特性,结果表明,其中心部位静态刚度达到200N/μm,Z向的固有频率达到1289Hz。
A micro-positioning work-piece table utilizing flexure hinges and rolling guide as preload and guiding mechanism is developed in this paper. It is characterized by simple structure, high resolution and rapid respond speed. The static and dynamic characters of it have been studied through the experimental method. The data show that the static stiffness of the micro-positioning work-piece table is 200 and the natural frequency in Z-direction is 1 289 Hz.
出处
《天津职业技术师范学院学报》
2002年第1期1-5,共5页
Journal of Tianjin Vocational Technical Teachers'college
基金
天津市自然科学基金项目(013605311)