摘要
模拟了散射电子在PMMA(聚甲基丙烯酸甲酯 )电子束胶层中的能量沉积分布。在处理电子穿越衬底的边界时 ,采用了几率确定法 ,用以判断电子是否在界面处发生一次弹性散射。
The spatial distribution of the energy deposition of the scattering electrons in PMMA resist is simulated. A new approach that whether or not an elastic scattering event occurs on the boundary is determined by a random number is utilized. The graphs of both forward scattering energy deposition and backscattering energy deposition have been given.
出处
《微细加工技术》
2002年第1期6-9,26,共5页
Microfabrication Technology
关键词
电子束背散射
胶层
能量沉积
E beam
energy deposition
random probability number
scatter
