摘要
使用脉冲Nd:YAG激光在单晶Si基底光热分解固相诱导化学沉积金属Ag和Au,其中Ag的最高沉积速度接近 10mm/s.SEM结果显示 Ag和 Au球形颗粒均匀分布在沉积线表面,用AES研究了Ag沉积线表面元素含量随深度分布。用X-Ray能谱分析了不同扫描速度沉积线表面金属元素含量。简单总结了固相诱导化学沉积Ag和Au的基本实验规律。
Pulsed Nd : YAG laser was used to induce chemical depositions of Ag and Au on Si substrate, which is a photothermal decomposition process. The highest deposition speed of Ag was nearly 10mm/s, SEM results showed that Ag and Au spheric particles were distributed evenly along the lines irradiated by laser. The distribution of the elements on Ag deposited lines with depth was analyzed by AES, and the contents of Ag and Au on all the deposited lines were investigated by X-ray spectroscopy. The basic experimental laws of the depositions of Ag and Au were also summarized simply.
出处
《应用激光》
CSCD
北大核心
2002年第1期15-18,共4页
Applied Laser
基金
国家重点基础研究发展规划基金项目(G2000067205-4)
