出处
《半导体技术》
CAS
CSCD
北大核心
2002年第4期8-11,共4页
Semiconductor Technology
基金
国家重点基础研究发展计划项目“信息功能材料相关基础问题”（G2000068300）；国家自然科学基金委员会的资助；中国科学院半导体材料科学重点实验室
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