HfO_2/SiO_2光学薄膜激光损伤阈值的测量

The Measurement of Laser Damage Threshold of Hafnia/Silica Multilayer Coatings

参照国际标准 ISO112 5 4及其规范 ,组建了小口径 10 6 4 nm激光的损伤阈值测量装置 ,能对各种光学元件 ,包括高反膜、偏振膜及增透膜等进行 10 6 4 nm激光损伤阈值测量。按损伤阈值测量国际标准的要求 ,测量了由 Hf O2 / Si O2 镀制的 10 6 4 nm高反膜、偏振膜及增透膜的激光损伤阈值 ,分析了它们的激光损伤特性 ,对于 10 ns的 10 6 4 nm激光脉冲 ,高反膜的损伤阈值为 12 .8J/ cm2 ,偏振膜为 9.8J/cm2 ,增透膜为 9.2 J/ cm2 ;对于 2 0 ns、1ns的激光脉冲 ,高反膜的损伤阈值分别为 15 .3J/ cm2和 5 .75 J/cm2 。高反膜的损伤阈值对于 ns激光脉冲符合时间定标率τ0 .35。

The 1 064 nm laser damage apparatus has been constructerd according to the international standard ISO 11254,which can measure the damage threshold of multilayer coatings.The threshold of coatings deposited by HfO 2/SiO 2 such as HR,AR and polarizer have been measured according to ISO11254.The results of damage threshold of coatings are shown as following:a) for 10 ns pulse:HR,12.8 J/cm 2,AR 9.2 J/cm 2;Polarizer 9.8 J/cm 2;b) for 20 ns pulse,HR 15.3 J/cm 2.c) for 1 ns pulse,HR 5.8 J/cm 2.The HR coating damage threshold is agreed with the time scale τ 0.35 .